Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor

doi:10.3390/s30900330

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Sensors 2003, 3(9), 330-339; doi:10.3390/s30900330

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Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor

Anette Simonis ^1,2, Hans Lüth ², Joseph Wang ³ and J. Schöning ^1,2^,*

¹ University of Applied Sciences Aachen, Ginsterweg 1, 52428 Jülich, Germany ² Institute of Thin Films and Interfaces, Research Centre Jülich GmbH, 52425 Jülich, Germany ³ New Mexico State University, Las Cruces, NM 88003-8001, USA

* Author to whom correspondence should be addressed.

Received: 7 April 2003 / Accepted: 15 July 2003 / Published: 11 September 2003

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Abstract: Different types of Ag/AgCl reference electrodes have been realised by means of thin- and thick-film technique. For inner electrolyte, KCl-containing membranes have been deposited and different coatings have been used to protect the reference electrode from a fast leaching out of KCl. The stability of the potential of the reference electrodes without KClcontaining membranes in 3 M KCl was about 7 hours for thin-film electrodes and up to 90 hours for thick-film electrodes. The reference electrodes with membrane were stable for more than two months. The thick-film reference electrode was integrated with a thin-film pH sensor onto one chip and the system pH sensor/reference electrode was investigated by means of capacitance/voltage (C/V) and constant capacitance (ConCap) mode.

Keywords: reference electrode; thin-film technique; thick-film technique; “one chip” sensor; pH sensor

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MDPI and ACS Style

Simonis, A.; Lüth, H.; Wang, J.; Schöning, J. Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor. Sensors 2003, 3, 330-339.

AMA Style

Simonis A., Lüth H., Wang J., Schöning J. Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor. Sensors. 2003; 3(9):330-339.

Chicago/Turabian Style

Simonis, Anette; Lüth, Hans; Wang, Joseph; Schöning, J. 2003. "Strategies of Miniaturised Reference Electrodes Integrated in a Silicon Based “one chip” pH Sensor." Sensors 3, no. 9: 330-339.

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