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Journal: Sensors, 2002
Volume: 2
Page(s): 11-22
11-22
Article: A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
Schöning, M.J.; Simonis, A.; Ruge, C.; Ecken, H.; Müller-Veggian, M.; Lüth, H.

http://www.mdpi.com/1424-8220/2/1/11

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