Journal: Sensors, 2002
Article: A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer
Schöning, M.J.; Simonis, A.; Ruge, C.; Ecken, H.; Müller-Veggian, M.; Lüth, H.
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