Next Article in Journal
Performance of Rayleigh-Based Distributed Optical Fiber Sensors Bonded to Reinforcing Bars in Bending
Previous Article in Journal
Sensor-Based Real-Time Detection in Vulcanization Control Using Machine Learning and Pattern Clustering
Previous Article in Special Issue
Design and Simulation of an Integrated Wireless Capacitive Sensors Array for Measuring Ventricular Pressure
Article Menu
Issue 9 (September) cover image

Export Article

Open AccessArticle
Sensors 2018, 18(9), 3124; https://doi.org/10.3390/s18093124

Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

System Electronic Group (Physics Department), Universitat de les Illes Balears, 07122 Palma (Balearic Islands), Spain
*
Author to whom correspondence should be addressed.
Received: 20 July 2018 / Revised: 10 September 2018 / Accepted: 13 September 2018 / Published: 16 September 2018
(This article belongs to the Special Issue MEMS Resonators)
Full-Text   |   PDF [4405 KB, uploaded 16 September 2018]   |  

Abstract

We analyzed experimentally the noise characteristics of fully integrated CMOS-MEMS resonators to determine the overall thermomechanical noise and its impact on the limit of detection at the system level. Measurements from four MEMS resonator geometries designed for ultrasensitive detection operating between 2-MHz and 8-MHz monolithically integrated with a low-noise CMOS capacitive readout circuit were analyzed and used to determine the resolution achieved in terms of displacement and capacitance variation. The CMOS-MEMS system provides unprecedented detection resolution of 11 yF·Hz−1/2 equivalent to a minimum detectable displacement (MDD) of 13 fm·Hz−1/2, enabling noise characterization that is experimentally demonstrated by thermomechanical noise detection and compared to theoretical model values. View Full-Text
Keywords: MEMS resonators; thermomechanical noise; sensors; CMOS-MEMS MEMS resonators; thermomechanical noise; sensors; CMOS-MEMS
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Perelló-Roig, R.; Verd, J.; Bota, S.; Segura, J. Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators. Sensors 2018, 18, 3124.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top