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Sensors 2018, 18(8), 2593; https://doi.org/10.3390/s18082593

Experiments on Temperature Changes of Microbolometer under Blackbody Radiation and Predictions Using Thermal Modeling by COMSOL Multiphysics Simulator

1
Department of Electrical and Electronic Engineering, Chung Cheng Institute of Technology, National Defense University, Taoyuan 33000, Taiwan
2
Materials & Electro-Optics Research Division, National Chung Shan Institute of Science and Technology, Taoyuan 32599, Taiwan
*
Author to whom correspondence should be addressed.
Received: 26 June 2018 / Revised: 5 August 2018 / Accepted: 6 August 2018 / Published: 8 August 2018
(This article belongs to the Special Issue Selected Papers from IEEE ICASI 2018)
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Abstract

In this study, we study a heat transfer model, with the surface of the microbolometer device receiving radiation from blackbody constructed using a COMSOL Multiphysics simulator. We have proposed three kinds of L-type 2-leg and 4-leg with the pixel pitch of 35 μm based on vanadium oxide absorbent membrane sandwiched with top passivated and bottom Si3N4 supporting films, respectively. Under the blackbody radiation, the surface temperature changes and distributions of these samples are simulated and analyzed in detail. The trend of change of the temperature dependent resistance of the four kinds of bolometer devices using the proposed heat transfer model is consistent with the actual results of the change of resistance of 4 samples irradiated with 325 K blackbody located in the front distance of 5 cm. In this paper, ΔT indicates the averaged differences of the top temperature on the suspended membrane and the lowest temperature on the post of legs of the microbolometers. It is shown that ΔT ≈ 17 mK is larger in nominal 2-leg microbolometer device than that of 4-leg one and of 2-leg with 2 μm × 2 μm central square hole and two 7.5 μm × 2 μm slits in suspended films. Additionally, only ΔT ≈ 5 mK with 4-leg microbolometer device under the same radiated energy of 325 K blackbody results from the larger total thermal conductance. View Full-Text
Keywords: COMSOL Multiphysics; heat transfer model; temperature coefficient of resistance (TCR); microbolometer; blackbody; thermal conductance; thermal equivalent resistance differences (TERD) COMSOL Multiphysics; heat transfer model; temperature coefficient of resistance (TCR); microbolometer; blackbody; thermal conductance; thermal equivalent resistance differences (TERD)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Deng, Y.-Z.; Tang, S.-F.; Zeng, H.-Y.; Wu, Z.-Y.; Tung, D.-K. Experiments on Temperature Changes of Microbolometer under Blackbody Radiation and Predictions Using Thermal Modeling by COMSOL Multiphysics Simulator. Sensors 2018, 18, 2593.

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