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Journal: Sensors, 2018
Volume: 18
Number: 1243

Article: Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach
Authors: by Ramin Mirzazadeh, Saeed Eftekhar Azam and Stefano Mariani
Link: https://www.mdpi.com/1424-8220/18/4/1243

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