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Sensors 2018, 18(3), 736; doi:10.3390/s18030736

A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement

State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
National Defense Key Laboratory of Pyrotechnical S&R Technology, The 213rd Research Institute of China Ordnance Industry, Xi’an 710061, China
Author to whom correspondence should be addressed.
Received: 9 February 2018 / Revised: 25 February 2018 / Accepted: 27 February 2018 / Published: 1 March 2018
(This article belongs to the Special Issue Sensors and Materials for Harsh Environments)
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With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor’s sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm × 0.1 mm × 2 μm and copper electrodes of 2 μm thick are sputtered sequentially on the substrate, and a 25 μm thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa−1. The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size. View Full-Text
Keywords: ultra-high pressure sensor; manganin thin film; MEMS technology; detonation pressure; microscale measurement ultra-high pressure sensor; manganin thin film; MEMS technology; detonation pressure; microscale measurement

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Zhang, G.; Zhao, Y.; Zhao, Y.; Wang, X.; Wei, X.; Ren, W.; Li, H.; Zhao, Y. A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement. Sensors 2018, 18, 736.

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