A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘†
AbstractIn this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around. The variation of gravity acceleration applied on the proof mass will result in frequency shifts of the DETFs. Angular tilt can be got by analyzing the frequency outputs. The structural design of the tilt sensor is optimized by finite element simulation and the device is microfabricated using a silicon-on-insulator process, followed by open-loop and closed-loop characterizations. Results show that the scale factor of such sensor is at least 11.53 Hz/degree. Minimum Allan deviation of the DETF oscillator is 220 ppb (parts per billion) of the resonant frequency for an 5 s integration time. Resolution of the tilt sensor is
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Wang, S.; Wei, X.; Weng, Y.; Zhao, Y.; Jiang, Z. A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘. Sensors 2018, 18, 346.
Wang S, Wei X, Weng Y, Zhao Y, Jiang Z. A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘. Sensors. 2018; 18(2):346.Chicago/Turabian Style
Wang, Shudong; Wei, Xueyong; Weng, Yinsheng; Zhao, Yulong; Jiang, Zhuangde. 2018. "A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360∘." Sensors 18, no. 2: 346.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.