Next Article in Journal
Combination of Multi-Agent Systems and Wireless Sensor Networks for the Monitoring of Cattle
Next Article in Special Issue
Sitting Posture Monitoring System Based on a Low-Cost Load Cell Using Machine Learning
Previous Article in Journal
A Monolithic Multisensor Microchip with Complete On-Chip RF Front-End
Previous Article in Special Issue
Wireless sEMG System with a Microneedle-Based High-Density Electrode Array on a Flexible Substrate
Article Menu
Issue 1 (January) cover image

Export Article

Open AccessArticle
Sensors 2018, 18(1), 107; https://doi.org/10.3390/s18010107

Highly Integrated MEMS-ASIC Sensing System for Intracorporeal Physiological Condition Monitoring

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
3
Department of Engineering Product Development, Singapore University of Technology and Design, Singapore 487372, Singapore
*
Authors to whom correspondence should be addressed.
Received: 31 October 2017 / Revised: 2 December 2017 / Accepted: 8 December 2017 / Published: 2 January 2018
(This article belongs to the Special Issue Biomedical Sensors and Systems 2017)
View Full-Text   |   Download PDF [8111 KB, uploaded 23 January 2018]   |  

Abstract

In this paper, a highly monolithic-integrated multi-modality sensor is proposed for intracorporeal monitoring. The single-chip sensor consists of a solid-state based temperature sensor, a capacitive based pressure sensor, and an electrochemical oxygen sensor with their respective interface application-specific integrated circuits (ASICs). The solid-state-based temperature sensor and the interface ASICs were first designed and fabricated based on a 0.18-μm 1.8-V CMOS (complementary metal-oxide-semiconductor) process. The oxygen sensor and pressure sensor were fabricated by the standard CMOS process and subsequent CMOS-compatible MEMS (micro-electromechanical systems) post-processing. The multi-sensor single chip was completely sealed by the nafion, parylene, and PDMS (polydimethylsiloxane) layers for biocompatibility study. The size of the compact sensor chip is only 3.65 mm × 1.65 mm × 0.72 mm. The functionality, stability, and sensitivity of the multi-functional sensor was tested ex vivo. Cytotoxicity assessment was performed to verify that the bio-compatibility of the device is conforming to the ISO 10993-5:2009 standards. The measured sensitivities of the sensors for the temperature, pressure, and oxygen concentration are 10.2 mV/°C, 5.58 mV/kPa, and 20 mV·L/mg, respectively. The measurement results show that the proposed multi-sensor single chip is suitable to sense the temperature, pressure, and oxygen concentration of human tissues for intracorporeal physiological condition monitoring. View Full-Text
Keywords: Temperature sensor; oxygen sensor; pressure sensor; multiple sensors; MEMS; CMOS-compatible process; intracorporeal physiological condition monitoring Temperature sensor; oxygen sensor; pressure sensor; multiple sensors; MEMS; CMOS-compatible process; intracorporeal physiological condition monitoring
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Xue, N.; Wang, C.; Liu, C.; Sun, J. Highly Integrated MEMS-ASIC Sensing System for Intracorporeal Physiological Condition Monitoring. Sensors 2018, 18, 107.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top