Highly Integrated MEMS-ASIC Sensing System for Intracorporeal Physiological Condition Monitoring
AbstractIn this paper, a highly monolithic-integrated multi-modality sensor is proposed for intracorporeal monitoring. The single-chip sensor consists of a solid-state based temperature sensor, a capacitive based pressure sensor, and an electrochemical oxygen sensor with their respective interface application-specific integrated circuits (ASICs). The solid-state-based temperature sensor and the interface ASICs were first designed and fabricated based on a 0.18-μm 1.8-V CMOS (complementary metal-oxide-semiconductor) process. The oxygen sensor and pressure sensor were fabricated by the standard CMOS process and subsequent CMOS-compatible MEMS (micro-electromechanical systems) post-processing. The multi-sensor single chip was completely sealed by the nafion, parylene, and PDMS (polydimethylsiloxane) layers for biocompatibility study. The size of the compact sensor chip is only 3.65 mm × 1.65 mm × 0.72 mm. The functionality, stability, and sensitivity of the multi-functional sensor was tested ex vivo. Cytotoxicity assessment was performed to verify that the bio-compatibility of the device is conforming to the ISO 10993-5:2009 standards. The measured sensitivities of the sensors for the temperature, pressure, and oxygen concentration are 10.2 mV/°C, 5.58 mV/kPa, and 20 mV·L/mg, respectively. The measurement results show that the proposed multi-sensor single chip is suitable to sense the temperature, pressure, and oxygen concentration of human tissues for intracorporeal physiological condition monitoring. View Full-Text
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Xue, N.; Wang, C.; Liu, C.; Sun, J. Highly Integrated MEMS-ASIC Sensing System for Intracorporeal Physiological Condition Monitoring. Sensors 2018, 18, 107.
Xue N, Wang C, Liu C, Sun J. Highly Integrated MEMS-ASIC Sensing System for Intracorporeal Physiological Condition Monitoring. Sensors. 2018; 18(1):107.Chicago/Turabian Style
Xue, Ning; Wang, Chao; Liu, Cunxiu; Sun, Jianhai. 2018. "Highly Integrated MEMS-ASIC Sensing System for Intracorporeal Physiological Condition Monitoring." Sensors 18, no. 1: 107.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.