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Sensors 2017, 17(9), 2088; https://doi.org/10.3390/s17092088

Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

1
Photonics Research Labs, Universitat Politècnica de València, c/ Camino de Vera s/n, 46021 Valencia, Spain
2
R&D Department, VLC Photonics S.L., c/ Camino de Vera s/n, 46021 Valencia, Spain
3
Grupo de Transductores Químicos (GTQ), Instituto de Microelectrónica de Barcelona (IMB-CNM, CSIC), 08193 Cerdanyola del Vallès, Barcelona, Spain
*
Author to whom correspondence should be addressed.
Received: 1 August 2017 / Revised: 31 August 2017 / Accepted: 6 September 2017 / Published: 12 September 2017
(This article belongs to the Special Issue Silicon Technologies for Photonic Sensors)
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Abstract

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform. View Full-Text
Keywords: silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer silicon nitride photonics; propagation loss; group index; group velocity dispersion; birefringence; full-field optical measurements; silicon photonics; photonic integrated circuits; generic integration; multi-project wafer
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Muñoz, P.; Micó, G.; Bru, L.A.; Pastor, D.; Pérez, D.; Doménech, J.D.; Fernández, J.; Baños, R.; Gargallo, B.; Alemany, R.; Sánchez, A.M.; Cirera, J.M.; Mas, R.; Domínguez, C. Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications. Sensors 2017, 17, 2088.

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