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Sensors 2017, 17(7), 1529; doi:10.3390/s17071529

Surface Acoustic Wave Sensor with Pd/ZnO Bilayer Structure for Room Temperature Hydrogen Detection

National Institute for Laser, Plasma and Radiation Physics, Laser Department, Atomistilor # 409, 077125 Bucharest-Magurele, Romania
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Received: 6 June 2017 / Revised: 20 June 2017 / Accepted: 28 June 2017 / Published: 29 June 2017
(This article belongs to the Special Issue Surface Acoustic Wave and Bulk Acoustic Wave Sensors)
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Abstract

A Surface Acoustic Wave (SAW) hydrogen sensor with a Pd/ZnO bilayer structure for room temperature sensing operation has been obtained by Pulsed Laser Deposition (PLD). The sensor structure combines a Pd layer with optimized porosity for maximizing mass effects, with the large acoustoelectric effect at the Pd/ZnO interface. The large acoustoelectric effect is due to the fact that ZnO has a surface conductivity which is highly sensitive to chemisorbed gases. The sensitivity of the sensor was determined for hydrogen concentrations between 0.2% and 2%. The limit of detection (LOD) of the bilayer sensor was about 4.5 times better than the single ZnO films and almost twice better than single Pd films. View Full-Text
Keywords: SAW sensor; hydrogen sensor; bilayer; pulsed laser deposition; nanoporous film; Palladium; ZnO SAW sensor; hydrogen sensor; bilayer; pulsed laser deposition; nanoporous film; Palladium; ZnO
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Viespe, C.; Miu, D. Surface Acoustic Wave Sensor with Pd/ZnO Bilayer Structure for Room Temperature Hydrogen Detection. Sensors 2017, 17, 1529.

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