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Sensors 2017, 17(6), 1355; doi:10.3390/s17061355

Aspheric Surface Measurement Using Capacitive Sensors

1
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China
2
Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, Mianyang 621000, China
*
Author to whom correspondence should be addressed.
Academic Editors: Christos Riziotis, Evangelos Hristoforou and Dimitrios Vlachos
Received: 15 April 2017 / Revised: 1 June 2017 / Accepted: 7 June 2017 / Published: 11 June 2017
(This article belongs to the Special Issue Materials and Applications for Sensors and Transducers)
View Full-Text   |   Download PDF [6129 KB, uploaded 11 June 2017]   |  

Abstract

This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with respect to an eccentric spherical surface. Based on the tested characteristic curve of the average effect of the sphere and probe, it was found that nonlinear and linear compensation resulted in high measurement accuracy. The capacitance probe was found to be trying to fulfill a need for performing nm-level precision measurement of aspheric electromagnetic surfaces. View Full-Text
Keywords: aspheric surface measurement; electromagnetic surface; capacitive probe; error compensation aspheric surface measurement; electromagnetic surface; capacitive probe; error compensation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Yuan, D.; Zhao, H.; Tao, X.; Li, S.; Zhu, X.; Zhang, C. Aspheric Surface Measurement Using Capacitive Sensors. Sensors 2017, 17, 1355.

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