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Sensors 2017, 17(6), 1310; doi:10.3390/s17061310

Development of High Sensitivity Humidity Sensor Based on Gray TiO2/SrTiO3 Composite

1
The School of Physics Science and Technology, Xinjiang University, Urumqi 830046, China
2
Shanghai Key Lab of Chemical Assessment and Sustainability, School of Chemical Science and Engineering, Tongji University, 1239 Siping Road, Shanghai 200092, China
3
Xinjiang Key Laboratory of Electronic Information Materials and Devices, Xinjiang Technical Institute of Physics & Chemistry, CAS, Urumqi 830011, China
*
Authors to whom correspondence should be addressed.
Academic Editors: Jesús M. Corres and Francisco J. Arregui
Received: 3 May 2017 / Revised: 31 May 2017 / Accepted: 2 June 2017 / Published: 7 June 2017
(This article belongs to the Special Issue Humidity Sensors)
View Full-Text   |   Download PDF [1896 KB, uploaded 7 June 2017]   |  

Abstract

A gray TiO2/SrTiO3 composite nanocrystalline sensor with narrow band-gap was successfully prepared through a facile wet chemical method. The precursor was calcined in N2 flow under atmospheric pressure and thereafter, a humidity sensor based on the composite was fabricated. The sensor showed high resistive sensitivity and varied by more than four orders of magnitude with an increase in relative humidity (RH) from 11% to 95%. The response and recovery time were about 3.1 s and 76 s, respectively with maximum hysteresis at 1% RH. In comparison with pure SrTiO3 and black TiO2, the gray composite based device exhibits a higher sensitivity. These results demonstrate the potential of gray TiO2/SrTiO3 for humidity sensing applications. View Full-Text
Keywords: humidity sensor; gray TiO2/SrTiO3 composite; semiconductor humidity sensor; gray TiO2/SrTiO3 composite; semiconductor
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Zhang, M.; Wei, S.; Ren, W.; Wu, R. Development of High Sensitivity Humidity Sensor Based on Gray TiO2/SrTiO3 Composite. Sensors 2017, 17, 1310.

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