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Sensors 2017, 17(5), 1142; doi:10.3390/s17051142

Room-Temperature Ammonia Sensor Based on ZnO Nanorods Deposited on ST-Cut Quartz Surface Acoustic Wave Devices

1
School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China
2
Sichuan Institute of Piezoelectric and Acousto-Optic Technology, Chongqing 400060, China
3
Faculty of Engineering & Environment, University of Northumbria, Newcastle upon Tyne NE1 8ST, UK
*
Authors to whom correspondence should be addressed.
Academic Editor: W. Rudolf Seitz
Received: 27 February 2017 / Revised: 3 April 2017 / Accepted: 3 May 2017 / Published: 17 May 2017
(This article belongs to the Special Issue Acoustic Wave Resonator-Based Sensors)
View Full-Text   |   Download PDF [5478 KB, uploaded 17 May 2017]   |  

Abstract

Using a seed layer-free hydrothermal method, ZnO nanorods (NRs) were deposited on ST-cut quartz surface acoustic wave (SAW) devices for ammonia sensing at room temperature. For a comparison, a ZnO film layer with a thickness of 30 nm was also coated onto an ST-cut quartz SAW device using a sol-gel and spin-coating technique. The ammonia sensing results showed that the sensitivity, repeatability and stability of the ZnO NR-coated SAW device were superior to those of the ZnO film-coated SAW device due to the large surface-to-volume ratio of the ZnO NRs. View Full-Text
Keywords: NH3 sensor; surface acoustic wave (SAW) device; ZnO nanorods; seed layer-free growth NH3 sensor; surface acoustic wave (SAW) device; ZnO nanorods; seed layer-free growth
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Li, W.; Guo, Y.; Tang, Y.; Zu, X.; Ma, J.; Wang, L.; Fu, Y.Q. Room-Temperature Ammonia Sensor Based on ZnO Nanorods Deposited on ST-Cut Quartz Surface Acoustic Wave Devices. Sensors 2017, 17, 1142.

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