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Sensors 2017, 17(3), 521; doi:10.3390/s17030521

5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
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Academic Editors: Michele Magno and Ilker Demirkol
Received: 9 February 2017 / Revised: 1 March 2017 / Accepted: 2 March 2017 / Published: 5 March 2017
(This article belongs to the Special Issue Systems and Software for Low Power Embedded Sensing)
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Abstract

The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively. View Full-Text
Keywords: 5 V compatible; MEMS scanning mirror; piezoelectric; PZT ceramic; mechanical leverage; impedance matching 5 V compatible; MEMS scanning mirror; piezoelectric; PZT ceramic; mechanical leverage; impedance matching
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Ye, L.; Zhang, G.; You, Z. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application. Sensors 2017, 17, 521.

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