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Sensors 2017, 17(2), 0284; doi:10.3390/s17020284

High-Sensitivity and Low-Hysteresis Porous MIMType Capacitive Humidity Sensor Using Functional Polymer Mixed with TiO2 Microparticles

Radio Frequency Integrated Circuit Center, Kwangwoon University, Nowon-gu, Seoul 139-701, Korea
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Received: 28 November 2016 / Accepted: 30 January 2017 / Published: 2 February 2017
(This article belongs to the Special Issue Humidity Sensors)
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Abstract

In this study, a high-sensitivity and low-hysteresis porous metal–insulator–metal-type capacitive humidity sensor is investigated using a functional polymer mixed with TiO2 microparticles. The humidity sensor consists of an optimally designed porous top electrode, a functional polymer humidity sensitive layer, a bottom electrode, and a glass substrate. The porous top electrode is designed to increase the contact area between the sensing layer and water vapor, leading to high sensitivity and quick response time. The functional polymer mixed with TiO2 microparticles shows excellent hysteresis under a wide humidity-sensing range with good longterm stability. The results show that as the relative humidity ranges from 10% RH to 90% RH, the proposed humidity sensor achieves a high sensitivity of 0.85 pF/% RH and a fast response time of less than 35 s. Furthermore, the sensor shows an ultra-low hysteresis of 0.95% RH at 60% RH, a good temperature dependence, and a stable capacitance value with a maximum of 0.17% RH drift during 120 h of continuous test. View Full-Text
Keywords: porous MIM-type capacitive humidity sensor; functional polymer; TiO2 microparticles. porous MIM-type capacitive humidity sensor; functional polymer; TiO2 microparticles.
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Liu, M.-Q.; Wang, C.; Kim, N.-Y. High-Sensitivity and Low-Hysteresis Porous MIMType Capacitive Humidity Sensor Using Functional Polymer Mixed with TiO2 Microparticles. Sensors 2017, 17, 0284.

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