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Sensors 2016, 16(8), 1162; doi:10.3390/s16081162

Substrate and Passivation Techniques for Flexible Amorphous Silicon-Based X-ray Detectors

1
Flexible Electronics and Display Center, Arizona State University, Tempe, AZ 85284, USA
2
School for Engineering of Matter, Transport, and Energy, Arizona State University, Tempe, AZ 85287, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Gonzalo Pajares Martinsanz
Received: 23 May 2016 / Revised: 19 July 2016 / Accepted: 19 July 2016 / Published: 26 July 2016
(This article belongs to the Special Issue Imaging: Sensors and Technologies)
View Full-Text   |   Download PDF [4037 KB, uploaded 26 July 2016]   |  

Abstract

Flexible active matrix display technology has been adapted to create new flexible photo-sensing electronic devices, including flexible X-ray detectors. Monolithic integration of amorphous silicon (a-Si) PIN photodiodes on a flexible substrate poses significant challenges associated with the intrinsic film stress of amorphous silicon. This paper examines how altering device structuring and diode passivation layers can greatly improve the electrical performance and the mechanical reliability of the device, thereby eliminating one of the major weaknesses of a-Si PIN diodes in comparison to alternative photodetector technology, such as organic bulk heterojunction photodiodes and amorphous selenium. A dark current of 0.5 pA/mm2 and photodiode quantum efficiency of 74% are possible with a pixelated diode structure with a silicon nitride/SU-8 bilayer passivation structure on a 20 µm-thick polyimide substrate. View Full-Text
Keywords: flexible electronics; flexible displays; flexible X-ray detectors; amorphous silicon PIN diodes; passivation flexible electronics; flexible displays; flexible X-ray detectors; amorphous silicon PIN diodes; passivation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Marrs, M.A.; Raupp, G.B. Substrate and Passivation Techniques for Flexible Amorphous Silicon-Based X-ray Detectors. Sensors 2016, 16, 1162.

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