Next Article in Journal
Vibration Sensitivity Reduction of Micromachined Tuning Fork Gyroscopes through Stiffness Match Method with Negative Electrostatic Spring Effect
Previous Article in Journal
Evaluation of Deployment Challenges of Wireless Sensor Networks at Signalized Intersections
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(7), 1142; doi:10.3390/s16071142

Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor

1,2
,
1,2,* , 1,2
,
1,2
,
1,2
,
1,2
,
1,2
,
1,2
,
1,2
and
1,2,*
1
National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China
2
Key Laboratory for Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 17 June 2016 / Revised: 10 July 2016 / Accepted: 19 July 2016 / Published: 22 July 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [3922 KB, uploaded 22 July 2016]   |  

Abstract

The main limitation of high-temperature piezoresistive pressure sensors is the variation of output voltage with operating temperature, which seriously reduces their measurement accuracy. This paper presents a passive resistor temperature compensation technique whose parameters are calculated using differential equations. Unlike traditional experiential arithmetic, the differential equations are independent of the parameter deviation among the piezoresistors of the microelectromechanical pressure sensor and the residual stress caused by the fabrication process or a mismatch in the thermal expansion coefficients. The differential equations are solved using calibration data from uncompensated high-temperature piezoresistive pressure sensors. Tests conducted on the calibrated equipment at various temperatures and pressures show that the passive resistor temperature compensation produces a remarkable effect. Additionally, a high-temperature signal-conditioning circuit is used to improve the output sensitivity of the sensor, which can be reduced by the temperature compensation. Compared to traditional experiential arithmetic, the proposed passive resistor temperature compensation technique exhibits less temperature drift and is expected to be highly applicable for pressure measurements in harsh environments with large temperature variations. View Full-Text
Keywords: high-temperature piezoresistive pressure sensor; passive resistor; temperature compensation high-temperature piezoresistive pressure sensor; passive resistor; temperature compensation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Yao, Z.; Liang, T.; Jia, P.; Hong, Y.; Qi, L.; Lei, C.; Zhang, B.; Li, W.; Zhang, D.; Xiong, J. Passive Resistor Temperature Compensation for a High-Temperature Piezoresistive Pressure Sensor. Sensors 2016, 16, 1142.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top