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Sensors 2016, 16(6), 872; doi:10.3390/s16060872

Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO

1
Department of Control Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
2
Ultra-Precision Optoelectronic Instrumentation Engineering Centre, Harbin Institute of Technology, Harbin 150001, China
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 22 April 2016 / Revised: 29 May 2016 / Accepted: 8 June 2016 / Published: 14 June 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [3299 KB, uploaded 14 June 2016]   |  

Abstract

To determine the planar motion of a 6-DOF precision stage, a measurement system based on three Hall sensors is adopted to obtain the X, Y, Rz motions of the stage. The machining and assembly errors in the actual mechanical system, which are difficult to measure directly, cause the parameters in the model of the Hall measurement system to deviate from their designed values. Additionally, the vertical movement of the stage will render the measurement model nonlinear. To guarantee the accuracy of the measurement, the parameters in the measurement model should be estimated and the nonlinearity compensated. In this paper, a novel approach based on self-adaptive hybrid TLBO (teaching-learning-based-optimization) is proposed to estimate the parameters in the Hall measurement model. The influences of zero deviations and vertical movements on the measurement accuracy are analyzed and compensated. The effectiveness of the proposed method is validated by experimental results obtained on a 6-DOF precision stage. Thanks to parameter estimation and calibration, the measurement error of the Hall sensor array is reduced to 6 micrometers. View Full-Text
Keywords: hall sensor; multi-DOF precision stage; TLBO algorithm; measurement system modeling hall sensor; multi-DOF precision stage; TLBO algorithm; measurement system modeling
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Chen, Z.; Liu, Y.; Fu, Z.; Song, S.; Tan, J. Calibration of the Hall Measurement System for a 6-DOF Precision Stage Using Self-Adaptive Hybrid TLBO. Sensors 2016, 16, 872.

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