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Sensors 2016, 16(6), 840; doi:10.3390/s16060840

The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

1
Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030000, Shanxi, China
2
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030000, Shanxi, China
*
Authors to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 8 April 2016 / Revised: 1 June 2016 / Accepted: 1 June 2016 / Published: 8 June 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method. View Full-Text
Keywords: dual-warhead Hopkinson bar; laser interferometer; dynamic linearity; accelerometer; measurement dual-warhead Hopkinson bar; laser interferometer; dynamic linearity; accelerometer; measurement
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Shi, Y.; Yang, Z.; Ma, Z.; Cao, H.; Kou, Z.; Zhi, D.; Chen, Y.; Feng, H.; Liu, J. The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer. Sensors 2016, 16, 840.

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