Next Article in Journal
Streetlight Control System Based on Wireless Communication over DALI Protocol
Next Article in Special Issue
Fano Resonance Based on Metal-Insulator-Metal Waveguide-Coupled Double Rectangular Cavities for Plasmonic Nanosensors
Previous Article in Journal
Sorption and Diffusion of Water Vapor and Carbon Dioxide in Sulfonated Polyaniline as Chemical Sensing Materials
Previous Article in Special Issue
Design and Verification of a Digital Controller for a 2-Piece Hemispherical Resonator Gyroscope
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(5), 603; doi:10.3390/s16050603

Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis

1,2
and
1,2,*
1
Department of Precision Instrument, Tsinghua University, Beijing 100084, China
2
State Key Laboratory of Precision Measurement Technology and Instruments, Tsinghua University, Beijing 100084, China
*
Author to whom correspondence should be addressed.
Academic Editor: Stephane Evoy
Received: 2 March 2016 / Revised: 21 April 2016 / Accepted: 22 April 2016 / Published: 27 April 2016
(This article belongs to the Special Issue Resonator Sensors)
View Full-Text   |   Download PDF [4170 KB, uploaded 11 May 2016]   |  

Abstract

The strain sensitivity of the Aluminum Nitride (AlN)/Silicon (Si) surface acoustic wave resonator (SAWR) is predicted based on a modeling method introduced in this work, and further compared with experimental results. The strain influence on both the period of the inter-digital transducer (IDT) and the sound velocity is taken into consideration when modeling the strain response. From the modeling results, AlN and Si have opposite responses to strain; hence, for the AlN/Si-based SAWR, both a positive and a negative strain coefficient factor can be achieved by changing the thickness of the AlN layer, which is confirmed by strain response testing based on a silicon cantilever structure with two AlN configurations (1 μm and 3 μm in thickness, respectively). View Full-Text
Keywords: surface acoustic wave resonator; aluminum nitride; strain coefficient factor surface acoustic wave resonator; aluminum nitride; strain coefficient factor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Chen, S.; You, Z. Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis. Sensors 2016, 16, 603.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top