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Sensors 2016, 16(12), 2131; doi:10.3390/s16122131

Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate

Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
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Academic Editor: Stefano Mariani
Received: 7 November 2016 / Revised: 6 December 2016 / Accepted: 12 December 2016 / Published: 14 December 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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Abstract

Flexible pressure sensors are essential components of electronic skins for future attractive applications ranging from human healthcare monitoring to biomedical diagnostics, robotic skins, and prosthetic limbs. Here we report a new kind of flexible pressure sensor. The sensors are capacitive, and composed of two Ag wrinkled electrodes separated by a carbon nanotubes (CNTs)/polydimethylsiloxane (PDMS) composite deformable dielectric layer. Ag wrinkled electrodes were formed by vacuum deposition on top of pre-strained and relaxed PDMS substrates which were treated using an O2 plasma, a surface functionalization process, and a magnetron sputtering process. Ultimately, the developed sensor exhibits a maximum sensitivity of 19.80% kPa−1 to capacitance, great durability over 500 cycles, and rapid mechanical responses (<200 ms). We also demonstrate that our sensor can be used to effectively detect the location and distribution of finger pressure. View Full-Text
Keywords: pressure sensor; flexible sensor; Ag wrinkled electrodes; carbon nanotube pressure sensor; flexible sensor; Ag wrinkled electrodes; carbon nanotube
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Cui, J.; Zhang, B.; Duan, J.; Guo, H.; Tang, J. Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate. Sensors 2016, 16, 2131.

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