Next Article in Journal
Flexible Pressure Sensor with Ag Wrinkled Electrodes Based on PDMS Substrate
Next Article in Special Issue
A Sensitive and Label-Free Pb(II) Fluorescence Sensor Based on a DNAzyme Controlled G-Quadruplex/Thioflavin T Conformation
Previous Article in Journal
Performance Prediction of a MongoDB-Based Traceability System in Smart Factory Supply Chains
Previous Article in Special Issue
Potentiometric Aptasensing of Vibrio alginolyticus Based on DNA Nanostructure-Modified Magnetic Beads
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(12), 2128; doi:10.3390/s16122128

Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor

Department of Electronic & Electrical Engineering, University of Bath, Bath BA2 7AY, UK
School of Electronic & Electrical Engineering, University of Leeds, Leeds LS2 9JT, UK
Department of Chemistry, University of Bath, Bath BA2 7AY, UK
Author to whom correspondence should be addressed.
Academic Editor: Huangxian Ju
Received: 20 October 2016 / Revised: 6 December 2016 / Accepted: 11 December 2016 / Published: 14 December 2016
(This article belongs to the Special Issue Nanobiosensing for Sensors)
View Full-Text   |   Download PDF [4759 KB, uploaded 14 December 2016]   |  


Nanogap sensors have a wide range of applications as they can provide accurate direct detection of biomolecules through impedimetric or amperometric signals. Signal response from nanogap sensors is dependent on both the electrode spacing and surface area. However, creating large surface area nanogap sensors presents several challenges during fabrication. We show two different approaches to achieve both horizontal and vertical coplanar nanogap geometries. In the first method we use electron-beam lithography (EBL) to pattern an 11 mm long serpentine nanogap (215 nm) between two electrodes. For the second method we use inductively-coupled plasma (ICP) reactive ion etching (RIE) to create a channel in a silicon substrate, optically pattern a buried 1.0 mm × 1.5 mm electrode before anodically bonding a second identical electrode, patterned on glass, directly above. The devices have a wide range of applicability in different sensing techniques with the large area nanogaps presenting advantages over other devices of the same family. As a case study we explore the detection of peptide nucleic acid (PNA)−DNA binding events using dielectric spectroscopy with the horizontal coplanar device. View Full-Text
Keywords: nanogap; horizontal coplanar; vertical coplanar; anodic bonding; dielectric; capacitance nanogap; horizontal coplanar; vertical coplanar; anodic bonding; dielectric; capacitance

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Hammond, J.L.; Rosamond, M.C.; Sivaraya, S.; Marken, F.; Estrela, P. Fabrication of a Horizontal and a Vertical Large Surface Area Nanogap Electrochemical Sensor. Sensors 2016, 16, 2128.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top