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Sensors 2016, 16(11), 1893; doi:10.3390/s16111893

Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties

1
Faculty of Mechanical Engineering and Design, Kaunas University of Technology, Studentu str. 56, Kaunas LT-51424, Lithuania
2
Institute of Materials Science, Kaunas University of Technology, Barsausko str. 59, Kaunas LT-51423, Lithuania
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 19 August 2016 / Revised: 29 September 2016 / Accepted: 7 October 2016 / Published: 10 November 2016
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [7582 KB, uploaded 10 November 2016]   |  

Abstract

With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-sensing capability. Different fabrication methods lead to the variation of the properties of the device itself. This research paper covers the fabrication of a novel PZT film and the investigations of its chemical, surface, and dynamic properties when film thickness is varied. A screen-printing technique was used for the formation of smooth films of 60 µm, 68 µm, and 25 µm thickness. A custom-made poling technique was applied to enhance the piezoelectric properties of the designed films. However, poling did not change any compositional or surface characteristics of the films; changes were only seen in the electrical ones. The results showed that a thinner poled PZT film having a chemical composition with the highest amount of copper and zirconium led to better electrical characteristics (generated voltage of 3.5 mV). View Full-Text
Keywords: microresonator; PZT; poling; coating microresonator; PZT; poling; coating
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Janusas, G.; Ponelyte, S.; Brunius, A.; Guobiene, A.; Vilkauskas, A.; Palevicius, A. Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties. Sensors 2016, 16, 1893.

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