Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures
Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
College of Electronic Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046, China
Author to whom correspondence should be addressed.
Academic Editor: W. Rudolf Seitz
Received: 30 March 2016 / Revised: 24 June 2016 / Accepted: 6 July 2016 / Published: 2 November 2016
The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of
ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized.
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MDPI and ACS Style
Lan, X.-D.; Zhang, S.-Y.; Fan, L.; Wang, Y. Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures. Sensors 2016, 16, 1112.
Lan X-D, Zhang S-Y, Fan L, Wang Y. Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures. Sensors. 2016; 16(11):1112.
Lan, Xiao-Dong; Zhang, Shu-Yi; Fan, Li; Wang, Yan. 2016. "Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures." Sensors 16, no. 11: 1112.
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