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Sensors 2016, 16(11), 1112; doi:10.3390/s16111112

Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures

1
Laboratory of Modern Acoustics, Institute of Acoustics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
2
College of Electronic Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046, China
*
Author to whom correspondence should be addressed.
Academic Editor: W. Rudolf Seitz
Received: 30 March 2016 / Revised: 24 June 2016 / Accepted: 6 July 2016 / Published: 2 November 2016
(This article belongs to the Section Physical Sensors)
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Abstract

The characteristics of two types of surface acoustic waves SAWs (Rayleigh waves and Love waves) propagating in bilayered structures of ( 11 2 ¯ 0 ) ZnO/R-sapphire are simulated by a finite element method (FEM) model, in which both SAWs have crossed propagation directions. Furthermore, based on the bilayered structures, the frequency responses of Rayleigh wave and Love wave humidity sensors are also simulated. Meanwhile, the frequency shifts, insertion loss changes and then the sensitivities of both humidity sensors induced by the adsorbed water layer perturbations, including the mechanical and electrical factors, are calculated numerically. Generally, the characteristics and performances of both sensors are strongly dependent on the thickness of the ZnO films. By appropriate selecting the ratio of the film thickness to SAW wavelength for each kind of the sensors, the performances of both sensors can be optimized. View Full-Text
Keywords: humidity sensor; surface acoustic wave; Rayleigh wave; Love wave; FEM simulation humidity sensor; surface acoustic wave; Rayleigh wave; Love wave; FEM simulation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Lan, X.-D.; Zhang, S.-Y.; Fan, L.; Wang, Y. Simulation of SAW Humidity Sensors Based on ( 11 2 ¯ 0 ) ZnO/R-Sapphire Structures. Sensors 2016, 16, 1112.

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