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Sensors 2016, 16(10), 1587; doi:10.3390/s16101587

Design of a Piezoelectric Accelerometer with High Sensitivity and Low Transverse Effect

State Key Laboratory for Mechanical Manufacturing Systems Egineering, Xi’an Jiaotong University, Xi’an 710049, China
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Academic Editor: Jörg F. Wagner
Received: 19 July 2016 / Revised: 20 September 2016 / Accepted: 21 September 2016 / Published: 26 September 2016
(This article belongs to the Special Issue Inertial Sensors and Systems 2016)
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Abstract

In order to meet the requirements of cable fault detection, a new structure of piezoelectric accelerometer was designed and analyzed in detail. The structure was composed of a seismic mass, two sensitive beams, and two added beams. Then, simulations including the maximum stress, natural frequency, and output voltage were carried out. Moreover, comparisons with traditional structures of piezoelectric accelerometer were made. To verify which vibration mode is the dominant one on the acceleration and the space between the mass and glass, mode analysis and deflection analysis were carried out. Fabricated on an n-type single crystal silicon wafer, the sensor chips were wire-bonged to printed circuit boards (PCBs) and simply packaged for experiments. Finally, a vibration test was conducted. The results show that the proposed piezoelectric accelerometer has high sensitivity, low resonance frequency, and low transverse effect. View Full-Text
Keywords: piezoelectric accelerometer; high sensitivity; low resonance frequency; low transverse effect piezoelectric accelerometer; high sensitivity; low resonance frequency; low transverse effect
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Tian, B.; Liu, H.; Yang, N.; Zhao, Y.; Jiang, Z. Design of a Piezoelectric Accelerometer with High Sensitivity and Low Transverse Effect. Sensors 2016, 16, 1587.

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