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Sensors 2015, 15(9), 21844-21856; doi:10.3390/s150921844

An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments

1
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China
2
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051
*
Authors to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 8 June 2015 / Revised: 17 August 2015 / Accepted: 24 August 2015 / Published: 31 August 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1002 KB, uploaded 31 August 2015]   |  

Abstract

Pressure measurements in high-temperature applications, including compressors, turbines, and others, have become increasingly critical. This paper proposes an implantable passive LC pressure sensor based on an alumina ceramic material for in situ pressure sensing in high-temperature environments. The inductance and capacitance elements of the sensor were designed independently and separated by a thermally insulating material, which is conducive to reducing the influence of the temperature on the inductance element and improving the quality factor of the sensor. In addition, the sensor was fabricated using thick film integrated technology from high-temperature materials that ensure stable operation of the sensor in high-temperature environments. Experimental results showed that the sensor accurately monitored pressures from 0 bar to 2 bar at temperatures up to 800 °C. The sensitivity, linearity, repeatability error, and hysteretic error of the sensor were 0.225 MHz/bar, 95.3%, 5.5%, and 6.2%, respectively. View Full-Text
Keywords: passive LC pressure sensor; Alumina ceramic; Pressure measurement; High-temperature application passive LC pressure sensor; Alumina ceramic; Pressure measurement; High-temperature application
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Xiong, J.; Li, C.; Jia, P.; Chen, X.; Zhang, W.; Liu, J.; Xue, C.; Tan, Q. An Insertable Passive LC Pressure Sensor Based on an Alumina Ceramic for In Situ Pressure Sensing in High-Temperature Environments. Sensors 2015, 15, 21844-21856.

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