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Sensors 2015, 15(9), 21567-21580; doi:10.3390/s150921567

Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures

1
Department of Mechanical Engineering, National Taiwan University, Taipei 10617, Taiwan
2
Department of Mechanical and Automation Engineering and Graduate Institute of Industrial Design, National Kaohsiung First University of Science and Technology, Kaoshiung 824, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 9 July 2015 / Revised: 14 August 2015 / Accepted: 24 August 2015 / Published: 28 August 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [3305 KB, uploaded 28 August 2015]   |  

Abstract

We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young’s modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system. View Full-Text
Keywords: microelectromechanical systems; digital-to-analog converter; parylene; electrostatic microactuators; white-light interferometry; micromirror microelectromechanical systems; digital-to-analog converter; parylene; electrostatic microactuators; white-light interferometry; micromirror
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ma, C.-W.; Lee, F.-W.; Liao, H.-H.; Kuo, W.-C.; Yang, Y.-J. Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures. Sensors 2015, 15, 21567-21580.

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