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Sensors 2015, 15(7), 17495-17506; doi:10.3390/s150717495

Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40)

1
Honeywell Romania SRL, Sensors and Wireless Laboratory Bucharest (SWLB), Bucharest 020339, Romania
2
Centre for Advanced Photonics and Electronics (CAPE), University of Cambridge, Cambridge CB3 0FA, UK
3
National Institute of Materials Physics, Bucharest-Magurele, P.O. Box. MG-7, Magurele 77125, Romania
4
Cambridge CMOS Sensors Ltd., Cambridge CB4 0DL, UK
*
Author to whom correspondence should be addressed.
Academic Editor: W. Rudolf Seitz
Received: 16 June 2015 / Revised: 24 June 2015 / Accepted: 29 June 2015 / Published: 20 July 2015
(This article belongs to the Section Chemical Sensors)
View Full-Text   |   Download PDF [849 KB, uploaded 22 July 2015]   |  

Abstract

The current paper reports on a sonochemical synthesis method for manufacturing nanostructured (typical grain size of 50 nm) SrTi0.6Fe0.4O2.8 (Sono-STFO40) powder. This powder is characterized using X ray-diffraction (XRD), Mössbauer spectroscopy and Scanning Electron Microscopy (SEM), and results are compared with commercially available SrTi0.4Fe0.6O2.8 (STFO60) powder. In order to manufacture resistive oxygen sensors, both Sono-STFO40 and STFO60 are deposited, by dip-pen nanolithography (DPN) method, on an SOI (Silicon-on-Insulator) micro-hotplate, employing a tungsten heater embedded within a dielectric membrane. Oxygen detection tests are performed in both dry (RH = 0%) and humid (RH = 60%) nitrogen atmosphere, varying oxygen concentrations between 1% and 16% (v/v), at a constant heater temperature of 650 °C. The oxygen sensor, based on the Sono-STFO40 sensing layer, shows good sensitivity, low power consumption (80 mW), and short response time (25 s). These performance are comparable to those exhibited by state-of-the-art O2 sensors based on STFO60, thus proving Sono-STFO40 to be a material suitable for oxygen detection in harsh environments. View Full-Text
Keywords: sonochemistry; STFO; oxygen sensing; silicon-on-Insulator; CMOS-compatible; dip-pen nanolithography; harsh environment sonochemistry; STFO; oxygen sensing; silicon-on-Insulator; CMOS-compatible; dip-pen nanolithography; harsh environment
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Stratulat, A.; Serban, B.-C.; de Luca, A.; Avramescu, V.; Cobianu, C.; Brezeanu, M.; Buiu, O.; Diamandescu, L.; Feder, M.; Ali, S.Z.; Udrea, F. Low Power Resistive Oxygen Sensor Based on Sonochemical SrTi0.6Fe0.4O2.8 (STFO40). Sensors 2015, 15, 17495-17506.

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