Next Article in Journal
Stimulating the Comfort of Textile Electrodes in Wearable Neuromuscular Electrical Stimulation
Previous Article in Journal
Marginalised Stacked Denoising Autoencoders for Robust Representation of Real-Time Multi-View Action Recognition
Article Menu

Export Article

Open AccessArticle
Sensors 2015, 15(7), 17232-17240; doi:10.3390/s150717232

On-Chip Sensing of Thermoelectric Thin Film’s Merit

1
Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, USA
2
Department of Electrical and Biomedical Engineering, University of Nevada, Reno, NV 89557, USA
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Received: 1 May 2015 / Revised: 19 June 2015 / Accepted: 13 July 2015 / Published: 16 July 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1412 KB, uploaded 16 July 2015]   |  

Abstract

Thermoelectric thin films have been widely explored for thermal-to-electrical energy conversion or solid-state cooling, because they can remove heat from integrated circuit (IC) chips or micro-electromechanical systems (MEMS) devices without involving any moving mechanical parts. In this paper, we report using silicon diode-based temperature sensors and specific thermoelectric devices to characterize the merit of thermoelectric thin films. The silicon diode temperature sensors and thermoelectric devices were fabricated using microfabrication techniques. Specifically, e-beam evaporation was used to grow the thermoelectric thin film of Sb2Te3 (100 nm thick). The Seebeck coefficient and the merit of the Sb2Te3 thin film were measured or determined. The fabrication of silicon diode temperature sensors and thermoelectric devices are compatible with the integrated circuit fabrication. View Full-Text
Keywords: silicon diode temperature sensors; thermoelectric thin films and devices; Sb2Te3 thin film; microfabrication silicon diode temperature sensors; thermoelectric thin films and devices; Sb2Te3 thin film; microfabrication
Figures

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Xiao, Z.; Zhu, X. On-Chip Sensing of Thermoelectric Thin Film’s Merit. Sensors 2015, 15, 17232-17240.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top