A Meliorated Multi-Frequency Band Pyroelectric Sensor
AbstractThis article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band. View Full-Text
Share & Cite This Article
Hsiao, C.-C.; Liu, S.-Y.; Siao, A.-S. A Meliorated Multi-Frequency Band Pyroelectric Sensor. Sensors 2015, 15, 16248-16264.
Hsiao C-C, Liu S-Y, Siao A-S. A Meliorated Multi-Frequency Band Pyroelectric Sensor. Sensors. 2015; 15(7):16248-16264.Chicago/Turabian Style
Hsiao, Chun-Ching; Liu, Sheng-Yi; Siao, An-Shen. 2015. "A Meliorated Multi-Frequency Band Pyroelectric Sensor." Sensors 15, no. 7: 16248-16264.