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Sensors 2015, 15(7), 15468-15477; doi:10.3390/s150715468

Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition

1
Department of Materials Science and Engineering, University of Seoul, 163, Seoulsiripdae-ro, Dongdaemun-gu, Seoul 130-743, Korea
2
Center for Electronic Materials, Korea Institute of Science and Technology, 5, Hwarang-ro 14-gil, Seongbuk-gu, Seoul 136-791, Korea
3
KU-KIST Graduate School of Converging Science and Technology, Korea University, 145, Anam-ro, Seongbuk-gu, Seoul 136-701, Korea
These authors contributed equally to this work.
*
Authors to whom correspondence should be addressed.
Academic Editor: Michael Tiemann
Received: 29 May 2015 / Revised: 24 June 2015 / Accepted: 25 June 2015 / Published: 30 June 2015
(This article belongs to the Special Issue Gas Sensors—Designs and Applications)
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Abstract

As highly sensitive H2S gas sensors, Au- and Ag-catalyzed SnO2 thin films with morphology-controlled nanostructures were fabricated by using e-beam evaporation in combination with the glancing angle deposition (GAD) technique. After annealing at 500 °C for 40 h, the sensors showed a polycrystalline phase with a porous, tilted columnar nanostructure. The gas sensitivities (S = Rgas/Rair) of Au and Ag-catalyzed SnO2 sensors fabricated by the GAD process were 0.009 and 0.015, respectively, under 5 ppm H2S at 300 °C, and the 90% response time was approximately 5 s. These sensors showed excellent sensitivities compared with the SnO2 thin film sensors that were deposited normally (glancing angle = 0°, S = 0.48). View Full-Text
Keywords: H2S sensor; nanosensor; SnO2 nanocolumn; glancing angle deposition H2S sensor; nanosensor; SnO2 nanocolumn; glancing angle deposition
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Yoo, K.S.; Han, S.D.; Moon, H.G.; Yoon, S.-J.; Kang, C.-Y. Highly Sensitive H2S Sensor Based on the Metal-Catalyzed SnO2 Nanocolumns Fabricated by Glancing Angle Deposition. Sensors 2015, 15, 15468-15477.

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