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Sensors 2015, 15(4), 8615-8623; doi:10.3390/s150408615

The Development of Love Wave-Based Humidity Sensors Incorporating Multiple Layers

Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
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Author to whom correspondence should be addressed.
Academic Editor: Michael Tiemann
Received: 5 February 2015 / Revised: 23 March 2015 / Accepted: 30 March 2015 / Published: 14 April 2015
(This article belongs to the Special Issue Gas Sensors—Designs and Applications)
View Full-Text   |   Download PDF [785 KB, uploaded 14 April 2015]   |  

Abstract

A Love wave humidity sensor is developed by using a multilayer structure consisting of PVA/SiO2 layers on an ST-90°X quartz substrate. The theoretical result shows that the sensor with such a two-layer structure can achieve a higher sensitivity and a smaller loss than the structures with a single polymer layer. Comparative experiments are performed for the sensor incorporating PVA/SiO2 layers and the sensor incorporating a PVA layer. The experimental results agree well with the theoretical predication. View Full-Text
Keywords: Love wave; humidity sensor; viscoelastic; multiple layers Love wave; humidity sensor; viscoelastic; multiple layers
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Wang, L.; Liu, J.; He, S. The Development of Love Wave-Based Humidity Sensors Incorporating Multiple Layers. Sensors 2015, 15, 8615-8623.

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