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Sensors 2015, 15(3), 6342-6359; doi:10.3390/s150306342

Robust Optimization of a MEMS Accelerometer Considering Temperature Variations

School of Mechanical Engineering, Tongji University, Shanghai 200092, China
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 25 November 2014 / Revised: 18 February 2015 / Accepted: 11 March 2015 / Published: 16 March 2015
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
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A robust optimization approach for a MEMS accelerometer to minimize the effects of temperature variations is presented. The mathematical model of the accelerometer is built. The effects of temperature variations on the output performance of the accelerometer are determined, and thermal deformation of the accelerometer is analyzed. The deviations of the output capacitance and resonance frequency due to temperature fluctuations are calculated and discussed. The sensitivity analysis method is employed to determine the design variables for robust optimization and find out the key structural parameters that have most significant influence on the output capacitance and resonance frequency of the accelerometer. The mathematical model and procedure for the robust optimization of the accelerometer are proposed. The robust optimization problem is solved and discussed. The robust optimization results show that an optimized accelerometer with high sensitivity, high temperature robustness and decoupling structure is finally obtained. View Full-Text
Keywords: MEMS; accelerometer; robust optimization; temperature variations; sensitivity analysis MEMS; accelerometer; robust optimization; temperature variations; sensitivity analysis

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Liu, G.; Yang, F.; Bao, X.; Jiang, T. Robust Optimization of a MEMS Accelerometer Considering Temperature Variations. Sensors 2015, 15, 6342-6359.

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