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Sensors 2015, 15(2), 2453-2472; doi:10.3390/s150202453

Analysis of Frequency Response and Scale-Factor of Tuning Fork Micro-Gyroscope Operating at Atmospheric Pressure

1
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
2
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Southeast University, Nanjing 210096, China
*
Author to whom correspondence should be addressed.
Received: 8 December 2014 / Accepted: 19 January 2015 / Published: 22 January 2015
(This article belongs to the Special Issue Inertial Sensors and Systems)
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Abstract

This paper presents a study of the frequency response and the scale-factor of a tuning fork micro-gyroscope operating at atmospheric pressure in the presence of an interference sense mode by utilizing the approximate transfer function. The optimal demodulation phase (ODP), which is always ignored in vacuum packaged micro-gyroscopes but quite important in gyroscopes operating at atmospheric pressure, is obtained through the transfer function of the sense mode, including the primary mode and the interference mode. The approximate transfer function of the micro-gyroscope is deduced in consideration of the interference mode and the ODP. Then, the equation describing the scale-factor of the gyroscope is also obtained. The impacts of the interference mode and Q-factor on the frequency response and the scale-factor of the gyroscope are analyzed through numerical simulations. The relationship between the scale-factor and the demodulation phase is also illustrated and gives an effective way to find out the ODP in practice. The simulation results predicted by the transfer functions are in close agreement with the results of the experiments. The analyses and simulations can provide constructive guidance on bandwidth and sensitivity designs of the micro-gyroscopes operating at atmospheric pressure. View Full-Text
Keywords: MEMS gyroscope; frequency response; scale-factor; atmospheric pressure; interference mode; demodulation phase MEMS gyroscope; frequency response; scale-factor; atmospheric pressure; interference mode; demodulation phase
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ding, X.; Li, H.; Ni, Y.; Sang, P. Analysis of Frequency Response and Scale-Factor of Tuning Fork Micro-Gyroscope Operating at Atmospheric Pressure. Sensors 2015, 15, 2453-2472.

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