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Sensors 2015, 15(12), 30311-30318; doi:10.3390/s151229809

Ultra-Compact 100 × 100 μm2 Footprint Hybrid Device with Spin-Valve Nanosensors

INESC-MN - Instituto de Engenharia de Sistemas e Computadores - Microsistemas e Nanotecnologias and IN - Institute of Nanoscience and Nanotechnology, Rua Alves Redol 9, Lisboa 1000-029, Portugal
Instituto Superior Técnico, Universidade de Lisboa, Av. Rovisco Pais, Lisboa 1000, Portugal
INL - International Iberian Nanotechnology Laboratory, Av. Mestre José Veiga, 4715 Braga, Portugal
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 29 October 2015 / Revised: 26 November 2015 / Accepted: 27 November 2015 / Published: 4 December 2015
(This article belongs to the Special Issue Magnetoresistive Sensors under Extreme Conditions)
View Full-Text   |   Download PDF [6919 KB, uploaded 4 December 2015]   |  


Magnetic field mapping with micrometric spatial resolution and high sensitivity is a challenging application, and the technological solutions are usually based on large area devices integrating discrete magnetic flux guide elements. In this work we demonstrate a high performance hybrid device with improved field sensitivity levels and small footprint, consisting of a ultra-compact 2D design where nanometric spin valve sensors are inserted within the gap of thin-film magnetic flux concentrators. Pole-sensor distances down to 400 nm are demonstrated using nanofabrication techniques combined with an optimized liftoff process. These 100 × 100 μm 2 pixel sensors can be integrated in modular devices for surface mapping without moving parts. View Full-Text
Keywords: spin valves; nanosensors; flux guides spin valves; nanosensors; flux guides

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Leitao, D.C.; Coelho, P.; Borme, J.; Knudde, S.; Cardoso, S.; Freitas, P.P. Ultra-Compact 100 × 100 μm2 Footprint Hybrid Device with Spin-Valve Nanosensors. Sensors 2015, 15, 30311-30318.

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