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Sensors 2015, 15(12), 30187-30198; doi:10.3390/s151229793

Development of a Wireless and Passive SAW-Based Chemical Sensor for Organophosphorous Compound Detection

1
Zhejiang University of Media and Communications, Hangzhou 310018, China
2
State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No.21, North 4th Ring West Road, Beijing 100190, China
3
State Key Laboratory of NBC Protection for Civilian, Yangfang, Changping District, Beijing 102205, China
*
Author to whom correspondence should be addressed.
Academic Editor: W. Rudolf Seitz
Received: 29 October 2015 / Revised: 20 November 2015 / Accepted: 30 November 2015 / Published: 3 December 2015
(This article belongs to the Section Chemical Sensors)
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Abstract

A new wireless and passive surface acoustic wave (SAW)-based chemical sensor for organophosphorous compound (OC) detection is presented. A 434 MHz reflective delay line configuration composed by single phase unidirectional transducers (SPUDTs) and three shorted reflectors was fabricated on YZ LiNbO3 piezoelectric substrate as the sensor element. A thin fluoroalcoholpolysiloxane (SXFA) film acted as the sensitive interface deposited onto the SAW propagation path between the second and last reflectors of the SAW device. The first reflector was used for the temperature compensation utilizing the difference method. The adsorption between the SXFA and OC molecules modulates the SAW propagation, especially for the time delay of the SAW, hence, the phase shifts of the reflection peaks from the corresponding reflectors can be used to characterize the target OC. Prior to the sensor fabrication, the coupling of modes (COM) and perturbation theory were utilized to predict the SAW device performance and the gas adsorption. Referring to a frequency-modulated continuous wave (FMCW)-based reader unit, the developed SAW chemical sensor was wirelessly characterized in gas exposure experiments for dimethylmethylphosphonate (DMMP) detection. Sensor performance parameters such as phase sensitivity, repeatability, linearity, and temperature compensation were evaluated experimentally. View Full-Text
Keywords: chemical sensor; organophosphorous compounds; fluoroalcoholpolysiloxane (SXFA); surface acoustic wave (SAW); wireless and passive chemical sensor; organophosphorous compounds; fluoroalcoholpolysiloxane (SXFA); surface acoustic wave (SAW); wireless and passive
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Xu, F.-Q.; Wang, W.; Xue, X.-F.; Hu, H.-L.; Liu, X.-L.; Pan, Y. Development of a Wireless and Passive SAW-Based Chemical Sensor for Organophosphorous Compound Detection. Sensors 2015, 15, 30187-30198.

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