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Sensors 2015, 15(10), 27047-27059; doi:10.3390/s151027047

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

1
Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan
2
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editor: Michael Tiemann
Received: 26 September 2015 / Revised: 18 October 2015 / Accepted: 20 October 2015 / Published: 23 October 2015
(This article belongs to the Special Issue Gas Sensors—Designs and Applications)
View Full-Text   |   Download PDF [2198 KB, uploaded 23 October 2015]   |  

Abstract

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. View Full-Text
Keywords: methanol sensor; tin dioxide; cadmium sulfide; heater methanol sensor; tin dioxide; cadmium sulfide; heater
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Fong, C.-F.; Dai, C.-L.; Wu, C.-C. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. Sensors 2015, 15, 27047-27059.

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