Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
AbstractA methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. View Full-Text
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Fong, C.-F.; Dai, C.-L.; Wu, C.-C. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. Sensors 2015, 15, 27047-27059.
Fong C-F, Dai C-L, Wu C-C. Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique. Sensors. 2015; 15(10):27047-27059.Chicago/Turabian Style
Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi. 2015. "Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique." Sensors 15, no. 10: 27047-27059.