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Sensors 2015, 15(10), 25761-25773; doi:10.3390/s151025761

Optimization of Surface Acoustic Wave-Based Rate Sensors

1
Zhejiang University of Media and Communications, 998 Xueyuan Street Higher Education Zone Xia Sha, Zhejiang 310018, China
2
State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, No. 21, BeiSiHuan West Road, Beijing 100190, China
*
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 25 August 2015 / Revised: 25 September 2015 / Accepted: 8 October 2015 / Published: 12 October 2015
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1526 KB, uploaded 12 October 2015]   |  

Abstract

The optimization of an surface acoustic wave (SAW)-based rate sensor incorporating metallic dot arrays was performed by using the approach of partial-wave analysis in layered media. The optimal sensor chip designs, including the material choice of piezoelectric crystals and metallic dots, dot thickness, and sensor operation frequency were determined theoretically. The theoretical predictions were confirmed experimentally by using the developed SAW sensor composed of differential delay line-oscillators and a metallic dot array deposited along the acoustic wave propagation path of the SAW delay lines. A significant improvement in sensor sensitivity was achieved in the case of 128° YX LiNbO3, and a thicker Au dot array, and low operation frequency were used to structure the sensor. View Full-Text
Keywords: Coriolis force; delay line-oscillator; metallic dot array; partial-wave analysis; SAW rate sensor Coriolis force; delay line-oscillator; metallic dot array; partial-wave analysis; SAW rate sensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Xu, F.; Wang, W.; Shao, X.; Liu, X.; Liang, Y. Optimization of Surface Acoustic Wave-Based Rate Sensors. Sensors 2015, 15, 25761-25773.

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