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Sensors 2015, 15(1), 1998-2005; doi:10.3390/s150101998

Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2

1
Conacyt, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico
2
Coordinación para la Innovación y la Aplicación de la Ciencia y la Tecnología, Universidad Autónoma de San Luis Potosí, 78000 San Luis Potosí, Mexico
*
Author to whom correspondence should be addressed.
Received: 5 November 2014 / Accepted: 19 December 2014 / Published: 16 January 2015
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Abstract

In this article nickel interdigital capacitors were fabricated on top of silicon substrates. The capacitance of the interdigital capacitor was optimized by coating the electrodes with a 60 nm layer of HfO2. An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements. Results show that modeling interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers. View Full-Text
Keywords: interdigital nanocapacitors; finite element method; capacitance interdigital nanocapacitors; finite element method; capacitance
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

González, G.; Kolosovas-Machuca, E.S.; López-Luna, E.; Hernández-Arriaga, H.; González, F.J. Design and Fabrication of Interdigital Nanocapacitors Coated with HfO2. Sensors 2015, 15, 1998-2005.

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