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Sensors 2014, 14(8), 14330-14338; https://doi.org/10.3390/s140814330

Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure

Key Laboratory of Optical Fiber Sensing and Communications (Ministry of Education of China), University of Electronic Science and Technology of China, Chengdu 611731, China
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Received: 10 March 2014 / Revised: 24 May 2014 / Accepted: 22 July 2014 / Published: 7 August 2014
(This article belongs to the Special Issue Micro-Optical Sensors)
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Abstract

Laser-machined microcavities for simultaneous measurement of high-temperature and high-pressure are demonstrated. These two cascaded microcavities are an air cavity and a composite cavity including a section of fiber and an air cavity. They are both placed into a pressure chamber inside a furnace to perform simultaneous pressure and high-temperature tests. The thermal and pressure coefficients of the short air cavity are ~0.0779 nm/°C and ~1.14 nm/MPa, respectively. The thermal and pressure coefficients of the composite cavity are ~32.3 nm/°C and ~24.4 nm/MPa, respectively. The sensor could be used to separate temperature and pressure due to their different thermal and pressure coefficients. The excellent feature of such a sensor head is that it can withstand high temperatures of up to 400 °C and achieve precise measurement of high-pressure under high temperature conditions. View Full-Text
Keywords: high pressure sensing; high temperature sensing; laser micromachining; micro-cavity; simultaneous measurement high pressure sensing; high temperature sensing; laser micromachining; micro-cavity; simultaneous measurement
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Ran, Z.; Liu, S.; Liu, Q.; Huang, Y.; Bao, H.; Wang, Y.; Luo, S.; Yang, H.; Rao, Y. Laser-Machined Microcavities for Simultaneous Measurement of High-Temperature and High-Pressure. Sensors 2014, 14, 14330-14338.

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