Next Article in Journal
Object Detection Techniques Applied on Mobile Robot Semantic Navigation
Next Article in Special Issue
Development of a Micro-Step Voltage-Fed Actuator with a Novel Stepper Motor for Automobile AGS Systems
Previous Article in Journal
A Secure-Enhanced Data Aggregation Based on ECC in Wireless Sensor Networks
Sensors 2014, 14(4), 6722-6733; doi:10.3390/s140406722

Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process

1 Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan 2 Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251, Taiwan
* Author to whom correspondence should be addressed.
Received: 18 February 2014 / Revised: 31 March 2014 / Accepted: 8 April 2014 / Published: 11 April 2014
View Full-Text   |   Download PDF [722 KB, uploaded 21 June 2014]   |   Browse Figures


The modeling and fabrication of a magnetic microsensor based on a magneto-transistor were presented. The magnetic sensor is fabricated by the commercial 0.18 mm complementary metal oxide semiconductor (CMOS) process without any post-process. The finite element method (FEM) software Sentaurus TCAD is utilized to analyze the electrical properties and carriers motion path of the magneto-transistor. A readout circuit is used to amplify the voltage difference of the bases into the output voltage. Experiments show that the sensitivity of the magnetic sensor is 354 mV/T at the supply current of 4 mA.
Keywords: magnetic sensor; magneto-transistor; CMOS magnetic sensor; magneto-transistor; CMOS
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
MDPI and ACS Style

Tseng, J.-Z.; Wu, C.-C.; Dai, C.-L. Modeling and Manufacturing of a Micromachined Magnetic Sensor Using the CMOS Process without Any Post-Process. Sensors 2014, 14, 6722-6733.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


Cited By

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert