Next Article in Journal
Previous Article in Journal
Sensors 2014, 14(2), 2417-2430; doi:10.3390/s140202417
Article

A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C

1,2
, 1,2,* , 1,2,* , 1,2
, 1,2
, 1,2
, 1,2, 1,2
, 1,2
 and 1,2
Received: 25 December 2013; in revised form: 22 January 2014 / Accepted: 23 January 2014 / Published: 30 January 2014
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1937 KB, uploaded 21 June 2014]
Abstract: In response to the growing demand for in situ measurement of pressure in high-temperature environments, a high temperature capacitive pressure sensor is presented in this paper. A high-temperature ceramic material-alumina is used for the fabrication of the sensor, and the prototype sensor consists of an inductance, a variable capacitance, and a sealed cavity integrated in the alumina ceramic substrate using a thick-film integrated technology. The experimental results show that the proposed sensor has stability at 850 °C for more than 20 min. The characterization in high-temperature and pressure environments successfully demonstrated sensing capabilities for pressure from 1 to 5 bar up to 600 °C, limited by the sensor test setup. At 600 °C, the sensor achieves a linear characteristic response, and the repeatability error, hysteresis error and zero-point drift of the sensor are 8.3%, 5.05% and 1%, respectively.
Keywords: high-temperature pressure sensor; in situ test; alumina ceramic; LC circuit high-temperature pressure sensor; in situ test; alumina ceramic; LC circuit
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Tan, Q.; Li, C.; Xiong, J.; Jia, P.; Zhang, W.; Liu, J.; Xue, C.; Hong, Y.; Ren, Z.; Luo, T. A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C. Sensors 2014, 14, 2417-2430.

AMA Style

Tan Q, Li C, Xiong J, Jia P, Zhang W, Liu J, Xue C, Hong Y, Ren Z, Luo T. A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C. Sensors. 2014; 14(2):2417-2430.

Chicago/Turabian Style

Tan, Qiulin; Li, Chen; Xiong, Jijun; Jia, Pinggang; Zhang, Wendong; Liu, Jun; Xue, Chenyang; Hong, Yingping; Ren, Zhong; Luo, Tao. 2014. "A High Temperature Capacitive Pressure Sensor Based on Alumina Ceramic for in Situ Measurement at 600 °C." Sensors 14, no. 2: 2417-2430.


Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert