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Sensors 2014, 14(12), 23337-23347; doi:10.3390/s141223337

A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology

1
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China
2
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China
*
Authors to whom correspondence should be addressed.
Received: 21 October 2014 / Revised: 18 November 2014 / Accepted: 27 November 2014 / Published: 5 December 2014
(This article belongs to the Section Physical Sensors)
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Abstract

An LC resonant pressure sensor with improved performance is presented in this paper. The sensor is designed with a buried structure, which protects the electrical components from contact with harsh environments and reduces the resonant-frequency drift of the sensor in high-temperature environments. The pressure-sensitive membrane of the sensor is optimized according to small-deflection-plate theory, which allows the sensor to operate in high-pressure environments. The sensor is fabricated using low-temperature co-fired ceramic (LTCC) technology, and a fugitive film is used to create a completed sealed embedded cavity without an evacuation channel. The experimental results show that the frequency drift of the sensor versus the temperature is approximately 0.75 kHz/°C, and the responsivity of the sensor can be up to 31 kHz/bar within the pressure range from atmospheric pressure to 60 bar. View Full-Text
Keywords: wireless passive pressure sensor; LTCC technology; high temperature characterization; high pressure characterization wireless passive pressure sensor; LTCC technology; high temperature characterization; high pressure characterization
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Li, C.; Tan, Q.; Xue, C.; Zhang, W.; Li, Y.; Xiong, J. A High-Performance LC Wireless Passive Pressure Sensor Fabricated Using Low-Temperature Co-Fired Ceramic (LTCC) Technology. Sensors 2014, 14, 23337-23347.

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