Sensors 2013, 13(7), 9070-9084; doi:10.3390/s130709070
Article

Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller

1,2,* email, 1,2email, 2email and 1,2email
Received: 8 June 2013; in revised form: 4 July 2013 / Accepted: 5 July 2013 / Published: 15 July 2013
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers. Then, the measurement strategy to measure the tip/tilt angles accurately in the order of sub-μrad is presented. A comprehensive composite control strategy design to enhance the tracking accuracy with a novel driving principle is also proposed. Finally, an experiment is presented to validate the measurement and control strategy. The experimental results demonstrate that the proposed measurement and control strategy provides accurate angle motion with a root mean square (RMS) error of 0.21 μrad, which is approximately equal to the noise level.
Keywords: piezo-based platform; ultra-precision angle motion; robust composite control
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MDPI and ACS Style

Liu, L.; Bai, Y.-G.; Zhang, D.-L.; Wu, Z.-G. Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller. Sensors 2013, 13, 9070-9084.

AMA Style

Liu L, Bai Y-G, Zhang D-L, Wu Z-G. Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller. Sensors. 2013; 13(7):9070-9084.

Chicago/Turabian Style

Liu, Lei; Bai, Yu-Guang; Zhang, Da-Li; Wu, Zhi-Gang. 2013. "Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller." Sensors 13, no. 7: 9070-9084.

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