Sensors 2013, 13(1), 865-874; doi:10.3390/s130100865
Article

Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

1,2,3,* email, 2email, 2,3email and 3email
Received: 7 November 2012; in revised form: 5 January 2013 / Accepted: 9 January 2013 / Published: 11 January 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R0 to 0.1 R0) of 3.2/17.5 s and a corresponding sensor response (ΔR/R0) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
Keywords: temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography
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MDPI and ACS Style

Tian, W.-C.; Ho, Y.-H.; Chen, C.-H.; Kuo, C.-Y. Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography. Sensors 2013, 13, 865-874.

AMA Style

Tian W-C, Ho Y-H, Chen C-H, Kuo C-Y. Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography. Sensors. 2013; 13(1):865-874.

Chicago/Turabian Style

Tian, Wei-Cheng; Ho, Yu-Hsuan; Chen, Chao-Hao; Kuo, Chun-Yen. 2013. "Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography." Sensors 13, no. 1: 865-874.


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