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Sensors 2013, 13(1), 865-874; doi:10.3390/s130100865

Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

1
Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
2
Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan
3
Graduate Institute of Biomedical Electronics and Bioinformatics, National Taiwan University, Taipei 10617, Taiwan
*
Author to whom correspondence should be addressed.
Received: 7 November 2012 / Revised: 5 January 2013 / Accepted: 9 January 2013 / Published: 11 January 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
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Abstract

In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R0 to 0.1 R0) of 3.2/17.5 s and a corresponding sensor response (ΔR/R0) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
Keywords: temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Tian, W.-C.; Ho, Y.-H.; Chen, C.-H.; Kuo, C.-Y. Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography. Sensors 2013, 13, 865-874.

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