Next Article in Journal
Deciphering the Crowd: Modeling and Identification of Pedestrian Group Motion
Next Article in Special Issue
Gas Sensors Characterization and Multilayer Perceptron (MLP) Hardware Implementation for Gas Identification Using a Field Programmable Gate Array (FPGA)
Previous Article in Journal
Hybrid Radar Emitter Recognition Based on Rough k-Means Classifier and Relevance Vector Machine
Previous Article in Special Issue
Overcoming the Slow Recovery of MOX Gas Sensors through a System Modeling Approach
Sensors 2013, 13(1), 865-874; doi:10.3390/s130100865
Article

Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography

1,2,3,* , 2
, 2,3
 and 3
Received: 7 November 2012; in revised form: 5 January 2013 / Accepted: 9 January 2013 / Published: 11 January 2013
(This article belongs to the Special Issue Gas Sensors - 2013)
View Full-Text   |   Download PDF [658 KB, uploaded 21 June 2014]   |   Browse Figures
Abstract: In this study, electron beam lithography, rather than the most popular method, chemical synthesis, is used to construct periodical TiO2 nanowires for a gas sensor with both robust and rapid performance. The effects of temperature on the sensing response and reaction time are analyzed at various operation temperatures ranging from 200 to 350 °C. At the optimized temperature of 300 °C, the proposed sensor repeatedly obtained a rise/recovery time (ΔR: 0.9 R0 to 0.1 R0) of 3.2/17.5 s and a corresponding sensor response (ΔR/R0) of 21.7% at an ethanol injection mass quantity of 0.2 μg.
Keywords: temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography temperature effect; TiO2 nanowire; gas sensors; electro-beam lithography
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Tian, W.-C.; Ho, Y.-H.; Chen, C.-H.; Kuo, C.-Y. Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography. Sensors 2013, 13, 865-874.

AMA Style

Tian W-C, Ho Y-H, Chen C-H, Kuo C-Y. Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography. Sensors. 2013; 13(1):865-874.

Chicago/Turabian Style

Tian, Wei-Cheng; Ho, Yu-Hsuan; Chen, Chao-Hao; Kuo, Chun-Yen. 2013. "Sensing Performance of Precisely Ordered TiO2 Nanowire Gas Sensors Fabricated by Electron-Beam Lithography." Sensors 13, no. 1: 865-874.


Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert