Sensors 2012, 12(7), 9697-9710; doi:10.3390/s120709697
Article

Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China
* Author to whom correspondence should be addressed.
Received: 14 May 2012; in revised form: 7 June 2012 / Accepted: 10 July 2012 / Published: 17 July 2012
(This article belongs to the Special Issue Ultra-Small Sensor Systems and Components)
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Abstract: Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distribution as well as static and dynamic characteristics of the platform were studied by the finite element method. Results of the calibration experiment indicate that the strain gauge sensor has good linearity and its sensitivity is about 0.0468 mV/μm. A closed-loop control system was established to solve the problem of nonlinearity of the platform. Experimental results demonstrate that for the displacement control process, both the displacement increasing portion and the decreasing portion have good linearity, verifying that the control system is available. The developed platform has a compact structure but can realize displacement measurement with the embedded strain gauges, which is useful for the closed-loop control and structure miniaturization of piezo devices. It has potential applications in nanoindentation and nanoscratch tests, especially in the field of in situ nanomechanical testing which requires compact structures.
Keywords: strain gauge; piezoactuator; precision positioning platform; calibration; closed-loop control

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MDPI and ACS Style

Huang, H.; Zhao, H.; Yang, Z.; Fan, Z.; Wan, S.; Shi, C.; Ma, Z. Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator. Sensors 2012, 12, 9697-9710.

AMA Style

Huang H, Zhao H, Yang Z, Fan Z, Wan S, Shi C, Ma Z. Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator. Sensors. 2012; 12(7):9697-9710.

Chicago/Turabian Style

Huang, Hu; Zhao, Hongwei; Yang, Zhaojun; Fan, Zunqiang; Wan, Shunguang; Shi, Chengli; Ma, Zhichao. 2012. "Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator." Sensors 12, no. 7: 9697-9710.

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