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Sensors 2012, 12(6), 7337-7349; doi:10.3390/s120607337
Article

Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio2/Su-8 on St-90°X Quartz

1
, 2,* , 2
 and 2
1 Zhejiang University of Media and Communications, Hangzhou 310018, China 2 Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
* Author to whom correspondence should be addressed.
Received: 6 April 2012 / Revised: 21 May 2012 / Accepted: 22 May 2012 / Published: 30 May 2012
(This article belongs to the Section Physical Sensors)
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Abstract

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO2 on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.
Keywords: Love wave; multi-guide; SU-8; SiO2; ST-90°X quartz; Tcf Love wave; multi-guide; SU-8; SiO2; ST-90°X quartz; Tcf
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Xu, F.; Wang, W.; Hou, J.; Liu, M. Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio2/Su-8 on St-90°X Quartz. Sensors 2012, 12, 7337-7349.

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