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Sensors 2012, 12(2), 1170-1180; doi:10.3390/s120201170

The Electromechanical Behavior of a Micro-Ring Driven by Traveling Electrostatic Force

1
School of Electromechanical Automobile Engineering, Yantai University, 32 Qingquan Road, Yantai 264005, China
2
Department of Mechanical and Electromechanical Engineering, National ILan University, 1 Section, Shen-Lung Road, ILan 260, Taiwan
3
Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, 150 Kuo Kuang Road, Taichung 402, Taiwan
*
Author to whom correspondence should be addressed.
Received: 4 January 2012 / Revised: 18 January 2012 / Accepted: 19 January 2012 / Published: 30 January 2012
(This article belongs to the Section Physical Sensors)
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Abstract

There is no literature mentioning the electromechanical behavior of micro structures driven by traveling electrostatic forces. This article is thus the first to present the dynamics and stabilities of a micro-ring subjected to a traveling electrostatic force. The traveling electrostatic force may be induced by sequentially actuated electrodes which are arranged around the flexible micro-ring. The analysis is based on a linearized distributed model considering the electromechanical coupling effects between electrostatic force and structure. The micro-ring will resonate when the traveling speeds of the electrostatic force approach some critical speeds. The critical speeds are equal to the ratio of the natural frequencies to the wave number of the correlative natural mode of the ring. Apart from resonance, the ring may be unstable at some unstable traveling speeds. The unstable regions appear not only near the critical speeds, but also near some fractions of some critical speeds differences. Furthermore the unstable regions expand with increasing driving voltage. This article may lead to a new research branch on electrostatic-driven micro devices. View Full-Text
Keywords: electrostatics; MEMS; microstructures; stabilities; traveling forces electrostatics; MEMS; microstructures; stabilities; traveling forces
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Ye, X.; Chen, Y.; Chen, D.-C.; Huang, K.-Y.; Hu, Y.-C. The Electromechanical Behavior of a Micro-Ring Driven by Traveling Electrostatic Force. Sensors 2012, 12, 1170-1180.

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