Journal: Sensors, 2012
Article: Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity
Yoshikawa, G.; Akiyama, T.; Loizeau, F.; Shiba, K.; Gautsch, S.; Nakayama, T.; Vettiger, P.; Rooij, N.F.; Aono, M.
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