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Sensors 2011, 11(8), 7763-7772; doi:10.3390/s110807763

A Single-Walled Carbon Nanotube Network Gas Sensing Device

1
Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu 30013, Taiwan
2
Department of Electrical Engineering, National Tsing Hua University, No. 101, Sec. 2, Kuang-Fu Road, Hsinchu 30013, Taiwan
3
Analytical Chemistry Section, Chung-Shan Institute of Science & Technology, Hsinchu 30325, Taiwan
4
Department of Applied Chemistry & Materials Science, Chung Cheng Institute of Technology, National Defense University, Taoyuan 33448, Taiwan
*
Author to whom correspondence should be addressed.
Received: 25 June 2011 / Revised: 25 July 2011 / Accepted: 5 August 2011 / Published: 8 August 2011
(This article belongs to the Section Chemical Sensors)
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Abstract

The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al2O3-deposted SiO2/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO2 and NH3 vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO2 and 24 ppm for NH3. View Full-Text
Keywords: single-walled carbon nanotube (SWCNT) networks; gas sensing device; chemical vapors single-walled carbon nanotube (SWCNT) networks; gas sensing device; chemical vapors
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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Wang, L.-C.; Tang, K.-T.; Teng, I.-J.; Kuo, C.-T.; Ho, C.-L.; Kuo, H.-W.; Su, T.-H.; Yang, S.-R.; Shi, G.-N.; Chang, C.-P. A Single-Walled Carbon Nanotube Network Gas Sensing Device. Sensors 2011, 11, 7763-7772.

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